Technology Quarterly | MONITOR

Extreme measures

Thanks to lithography using extreme ultraviolet light, chip makers can remain abreast of Moore’s Law for a few more years

THERE have been false warnings aplenty, but this time it looks real—or, at least, more real than at any time before. The fact is that silicon chips, as the world knows them, are reaching their limits. The present form of optical-projection lithography, which uses light to print circuit patterns on slivers of silicon, will soon hit the buffers. The wavelength of the light it uses means it is unable to print lines narrower than 0.1 micron (ie, one tenth of a millionth of a metre). Small as it may sound, that will still be too wide to fit the number of circuits on a chip that the semiconductor industry needs to keep up, as it has done for decades, with Moore's Law.

This article appeared in the Technology Quarterly section of the print edition under the headline “Extreme measures”

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From the June 23rd 2001 edition

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